Semiconductors

Ultra-clean, low-outgassing lubricants for wafer handling and vacuum equipment, where particle generation is the limiting factor.

  • Ultra-clean

    Engineered for minimal particle generation and maximum purity.

  • Low outgassing

    Maintains vacuum integrity and protects sensitive processes.

  • Particle control

    Helps achieve the highest standards in cleanroom environments.

  • Stable performance

    Reliable lubrication across wide temperature ranges and long service life.

  • Cleaner processes

  • Higher yields

  • A more sustainable future

By product type

Semiconductors lubricants by type

The kinds of product semiconductors plants and operators buy. Each page says what the product is, how to choose a grade, and lists the grades we hold from every maker.